Junhe (Shanghai) Instrument Co., Ltd
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YAMATO plasma ashing machine PR210C/300/301 economical, high-frequency plasma
A small desktop plasma cleaning machine for surface modification and cleaning of samples
Product details

A small desktop plasma cleaning machine for surface modification and cleaning of samples.

Purpose:
The functional groups attached to the surface of polymer materials improve adhesion and cohesion. By oxidation reaction, - OH is produced on the surface Functional groups such as C=O and - COOH (influenced by trace amounts of water and carbon dioxide).
In nitrogen plasma, nitrogen atoms are absorbed on the surface, generating functional groups such as - NH2.
• Crystal silicon circular etching.
Surface modification of materials (metals, polymers, films, ceramics, etc.).
Asbestos pretreatment (membrane filtration ashing).
From electronic devices to the biochemical market.
Low temperature ashing (for polymer materials, coal, food, etc.).
Use glass and PDMS board to paste PDMS chips.
• Surface organic matter removal.

characteristic:
High performance output type (PR200) with RF of 200W.
Due to its compact size, the desktop computer can be installed in very small positions.
Synchronization, automatic tuning, simple operation (PR200).
• Plasma reactor (ashing equipment) (PR200).
• Synchronization, automatic tuning (PR200).

Product advantages:
The plasma cleaning machine has good cleaning effect, high cleaning efficiency, high power, and wide application range.
There are no requirements for material, appearance size, etc. for cleaning samples.
During the plasma cleaning process, the temperature rise is very small and can basically reach room temperature treatment.
Efficient specially designed electrodes ensure the generation of uniform plasma.
Specially designed electrodes and tray structures ensure comprehensive and effective cleaning of samples.



Specifications:

model

PR200

PR301

Method

DP mode, cylindrical cavity

Performance

Generator power:

0-200W

0-300W

Generator frequency:

RF 13.56Mhz

Generator matching method:

Auto matching

Manual matching

Composition

Material of the cavity:

High borosilicate glass

Dimensions inside the cavity:

φ100×L160mm

φ118×L160mm

Reaction gas:

A process gas that can support non corrosive gases such as oxygen, argon, and nitrogen.

Control method:

semi-automatic control

Vacuum degree display:

Digital Pirani sensor, real-time display of vacuum degree inside the cavity.

Analog pressure gauge

Piping material:

SUS stainless steel and Teflon

Door:

Hinged door

External dimensions:

W350×D400×H500mm

W438×D520×H630mm

Vacuum pump pumping speed:

4m3/hour

Power specifications:

AC220V 10A

Weight:

About 25kg

About 34kg

Accessories

One set of vacuum fittings, one set of vacuum adapter joints, and one sample tray.



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